Atomic-layer deposited IrO 2 nanodots for charge-trap flash-memory devices

✍ Scribed by Choi, Sangmoo; Cha, Young-Kwan; Seo, Bum-Seok; Park, Sangjin; Park, Ju-Hee; Shin, Sangmin; Seol, Kwang Soo; Park, Jong-Bong; Jung, Young-Soo; Park, Youngsoo; Park, Yoondong; Yoo, In-Kyeong; Choi, Suk-Ho

• Book ID: 119957767
• Publisher: Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 223 KB
• Volume: 40
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/40/5/017