Atomic layer deposition of high-density Pt nanodots on Al2O3film using (MeCp)Pt(Me)3and O2precursors for nonvolatile memory applications

✍ Scribed by Shi-Jin Ding, Hong-Bing Chen, Xing-Mei Cui, Sun Chen…

• Book ID: 120947725
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 800 KB
• Volume: 8
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276X-8-80