Remote Microwave PECVD for Continuous, W
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V. Hopfe; R. Spitzl; I. Dani; G. Maeder; L. Roch; D. Rogler; B. Leupolt; B. Scho
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Article
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2005
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John Wiley and Sons
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English
β 975 KB
## Abstract In order to establish economic coating technologies for massβproduced materials, the widely used, microwave plasmaβenhanced (PE) CVD technology has been extended to atmospheric pressure operation. Microwave plasma activation substantially widens the range of potential applications compa