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Linear Extended ArcJet-CVD – a New PECVD Approach for Continuous Wide Area Coating Under Atmospheric Pressure

✍ Scribed by V. Hopfe; D. Rogler; G. Maeder; I. Dani; K. Landes; E. Theophile; M. Dzulko; C. Rohrer; C. Reichhold

Book ID
102814632
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
814 KB
Volume
11
Category
Article
ISSN
0948-1907

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Remote Microwave PECVD for Continuous, Wide-Area Coating Under Atmospheric Pressure
✍ V. Hopfe; R. Spitzl; I. Dani; G. Maeder; L. Roch; D. Rogler; B. Leupolt; B. Scho 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 975 KB

## Abstract In order to establish economic coating technologies for mass‐produced materials, the widely used, microwave plasma‐enhanced (PE) CVD technology has been extended to atmospheric pressure operation. Microwave plasma activation substantially widens the range of potential applications compa