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Arrayed miniature electron beam columns

โœ Scribed by T.H.P. Chang; L.P. Muray; U. Staufer; D.P. Kern

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
758 KB
Volume
21
Category
Article
ISSN
0167-9317

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๐Ÿ“œ SIMILAR VOLUMES

A manufacturable miniature electron beam
A manufacturable miniature electron beam column
โœ James P. Spallas; Charles S. Silver; Lawrence P. Muray; Torquil Wells; Mohamed E ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 410 KB

A new and manufacturable miniature electron beam column has been designed, fabricated and tested. The low-voltage, all electrostatic, microfabricated electron beam column includes lenses consisting of bonded stacks of micro-machined silicon and glass. The lenses are microfabricated on 150 mm diamete