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Microfabrication of lenses of a miniaturized electron column

✍ Scribed by M. Despont; U. Staufer; C. Stebler; R. Germann; P. Vettiger

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
826 KB
Volume
27
Category
Article
ISSN
0167-9317

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