New method for fabrication of an array of individually controllable miniaturized electrostatic lenses

✍ Scribed by H.S. Gross; F.E. Prins; D.P. Kern

• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 210 KB
• Volume: 35
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(96)00187-6

✦ Synopsis

We have fabricated arrays of silicon membranes and structures such as silicon contact pads and interconnecting silicon-wires on borosilicate glass as carrier material and isolator. We propose a new method to align and assemble these basic modules to form electrostatic electron optical components such as lenses and multipoles. This enables the fabrication of arrays of mutually aligned e-beam microcolumns.