✦ LIBER ✦
Arrayed miniature electron beam columns for high throughput sub-100 nm lithography: Chang, T. H. P.; Kern, D. P.; Muray, L. P. Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena. 1992 Nov; 10(6)
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 142 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0141-6359
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