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Arc discharge ion source for europium and other refractory metals implantation

✍ Scribed by Turek, M.; Prucnal, S.; Drozdziel, A.; Pyszniak, K.


Book ID
118738646
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
647 KB
Volume
80
Category
Article
ISSN
0034-6748

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