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Ar implantation of InSb and AlN at 15 K

✍ Scribed by E. Wendler; W. Wesch

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 126 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.199

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Ar implantation of InSb and AlN at 15&#xa0;K

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