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Applications of gas cluster ion beams for materials processing

✍ Scribed by Isao Yamada

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Novel materials processing and applicati

✍ Yamada, I. 📂 Article 📅 1999 🏛 Springer 🌐 English ⚖ 585 KB

Gas cluster ion beams for wafer processi

✍ M.E. Mack 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Low-damage surface processing by gas clu

✍ M. Akizuki; J. Matsuo; M. Harada; S. Ogasawara; A. Doi; K. Yoneda; T. Yamaguchi; 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 393 KB

Gas cluster ion beam equipments for indu

✍ J. Matsuo; H. Abe; G.H. Takaoka; I. Yamada 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 321 KB

Current research topics and applications

✍ Isao Yamada; Noriaki Toyoda 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 89 KB

Low-damage processing using size-control

✍ Noriaki Toyoda; Isao Yamada 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 477 KB