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Application of XPS and factor analysis for non-conducting materials

✍ Scribed by Oswald, S.; Baunack, S.

Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
471 KB
Volume
25
Category
Article
ISSN
0142-2421

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✦ Synopsis

Data analysis with multivariate mathematical methods is commonly used more and more also for applications in electron spectroscopy. This paper concerns the use of factor analysis in x-ray photoelectron spectroscopy and is focused on the problems occurring during investigations of non-conducting materials. Possibilities of the correction of the charging e †ect are discussed, considering the aspects of background subtraction and spectra concatenation. The e †orts of the proposed procedures are demonstrated with model experiments and depth proÐle measurements.

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