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Application of the physics of plasma sheaths to the modeling of rf plasma reactors

✍ Scribed by Metze, A.; Ernie, D. W.; Oskam, H. J.

Book ID: 118138110
Publisher: American Institute of Physics
Year: 1986
Tongue: English
Weight: 755 KB
Volume: 60
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.337764

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