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Applications of the cavity ring-down technique to a large-area rf-plasma reactor

✍ Scribed by Grangeon, F; Monard, C; Dorier, J-L; Howling, A A; Hollenstein, Ch; Romanini, D; Sadeghi, N

Book ID: 121444622
Publisher: Institute of Physics
Year: 1999
Tongue: English
Weight: 330 KB
Volume: 8
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/8/3/315

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