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Application of stencil masks for ion beam lithographic patterning

✍ Scribed by Brun, S.; Savu, V.; Schintke, S.; Guibert, E.; Keppner, H.; Brugger, J.; Whitlow, H.J.

Book ID: 123434682
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 904 KB
Volume: 306
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.12.064

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