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Application of secondary neutral mass spectrometry in low-energy sputtering yield measurements

✍ Scribed by S. Bhattacharjee; J. Zhang; V. Shutthanandan; P.K. Ray; N.R. Shivaparan; R.J. Smith

Book ID: 114169168
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 629 KB
Volume: 129
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00145-6

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