✦ LIBER ✦

Auger electron spectroscopy in sputtering measurements: Application to low-energy Ar+ sputtering of Ag and Nb

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 137 KB
Volume: 26
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(76)81097-4

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✦ Synopsis

The advantages of ion etching over wet chemical etching are demonstrated, e,g. structure resolution in the region of the etching depth, no undercutting, excellent reproducibility and high adherence of small striplines.

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