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Application of infrared Fourier transform phase-modulated ellipsometry to the characterization of silicon-based amorphous thin films

✍ Scribed by A. Canillas; E. Pascual; J.L. Andújar; J. Campmany; E. Bertran

Book ID: 114086395
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 176 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00975-9

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