FTIR phase-modulated ellipsometry characterization of hydrogenated amorphous silicon nitride thin films with embedded nanoparticles

✍ Scribed by A. Canillas; A. Pinyol; J. Sancho-Parramon; J. Ferré-Borrull; E. Bertran

• Book ID: 113936665
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 432 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2003.11.204