Application of glow discharge optical emission spectroscopy (GDOES) to the analysis of PVD- and CVD-layers
β Scribed by Volker Hoffmann
- Book ID
- 112290676
- Publisher
- Springer
- Year
- 1993
- Tongue
- English
- Weight
- 323 KB
- Volume
- 346
- Category
- Article
- ISSN
- 1618-2650
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π SIMILAR VOLUMES
Anodic alumina Γlms with precisely known distributions of incorporated species have been used as standards for glow discharge optical emission spectrometry (GDOES) depth proΓling analysis to quantify depth resolution. It is evident that the depth resolution of GDOES is excellent and is comparable wi
A comparative study of two techniques to depth proΓle multilayer Ni-Fe alloy coatings has been performed. Both conventional cross-sectioning with energy-dispersive x-ray imaging (EDX) and glow discharge optical emission spectroscopy (GDOES) sputter depth proΓling methods have been compared in terms