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Application of epoxy-based photosensitive polymers for optical MEMS and subsequent reliability evaluation

✍ Scribed by Jongwoo Park; D.-S. Shin

Book ID: 113781729
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 431 KB
Volume: 98
Category: Article
ISSN: 0254-0584
DOI: 10.1016/j.matchemphys.2005.09.026

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