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[IEEE Nanophotonics - Istanbul, Turkey (2011.08.8-2011.08.11)] 16th International Conference on Optical MEMS and Nanophotonics - Fabrication and evaluation of polymer MEMS mirror based on the mechanical characteristic of polymer containing magnetic particles

✍ Scribed by Miura, Takuya; Suzuki, Takaaki; Terao, Kyouhei; Takao, Hidekuni; Oohira, Fumikazu; Kaibara, Yoshinori; Namazu, Takahiro

Book ID: 121839007
Publisher: IEEE
Year: 2011
Weight: 443 KB
Category: Article
ISBN: 1457703343
DOI: 10.1109/OMEMS.2011.6031025

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