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Application of aluminum nitride films for electronic devices

✍ Scribed by Belyanin, A.F; Bouilov, L.L; Zhirnov, V.V; Kamenev, A.I; Kovalskij, K.A; Spitsyn, B.V

Book ID: 118161475
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 139 KB
Volume: 8
Category: Article
ISSN: 0925-9635
DOI: 10.1016/s0925-9635(98)00412-9

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