✦ LIBER ✦
Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices
✍ Scribed by Zalazar, M.; Gurman, P.; Park, J.; Kim, D.; Hong, S.; Stan, L.; Divan, R.; Czaplewski, D.; Auciello, O.
- Book ID
- 120014178
- Publisher
- American Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 710 KB
- Volume
- 102
- Category
- Article
- ISSN
- 0003-6951
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