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Apparent coefficient of thermal expansion and residual stresses in multilayer capacitors

โœ Scribed by Chun-Hway Hsueh; Mattison K. Ferber


Book ID
117758408
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
452 KB
Volume
33
Category
Article
ISSN
1359-835X

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Residual stress and thermal expansion co
โœ Akira Morinaka; Yoshihiro Asano ๐Ÿ“‚ Article ๐Ÿ“… 1982 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 554 KB

The residual stress in plasma polymerized films and its annealing effect were measured by employing the Newton ring method. The plasma polymerized films studied were hexamethyldisiloxane (HMDS), norbornadiene (NBD), and acryronitrile (AN) films. The stress in the film is compressive, and this compre