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Apparatus for cooling a sputtering target

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📜 SIMILAR VOLUMES

Cathode cooling apparatus for a planar m

✍ Lake, M. R. 📂 Article 📅 1984 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 512 KB

Sputtering apparatus for disks

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 157 KB

Apparatus for ionized sputtering

📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 119 KB

Apparatus for cathode sputtering

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 135 KB

A New Apparatus for Cathodic Sputtering

✍ HOLLAND, L. 📂 Article 📅 1956 🏛 Nature Publishing Group 🌐 English ⚖ 103 KB

Performance of a planar magnetron sputte

✍ Qing-Ming Chen; Yu-Dian Fan; Heng-De Li 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 903 KB