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Anodic aluminum oxide membrane bonded on a silicon wafer for carbon nanotube field emitter arrays

✍ Scribed by Jung, Hyun Young; Jung, Sung Mi; Gu, Geun Hoi; Suh, Jung Sang

Book ID: 115462442
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 383 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2216357

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## Abstract Carbon nanotube (CNT) arrays with different packing density were synthesized by inductively coupled plasma (ICP‐)CVD using anodic alumina oxide (AAO) on Si as a nanotemplate. Pre‐electrodeposited Ni nanowires and CH~4~ were used as catalyst and reaction gas, respectively. The parameters