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Synthesis of carbon nanotubes with identical dimensions using an anodic aluminum oxide template on a silicon wafer

✍ Scribed by Ok-Joo Lee; Sun-Kyu Hwang; Soo-Hwan Jeong; Pyung Soo Lee; Kun-Hong Lee


Book ID
116897383
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
218 KB
Volume
148
Category
Article
ISSN
0379-6779

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## Abstract Carbon nanotube (CNT) arrays with different packing density were synthesized by inductively coupled plasma (ICP‐)CVD using anodic alumina oxide (AAO) on Si as a nanotemplate. Pre‐electrodeposited Ni nanowires and CH~4~ were used as catalyst and reaction gas, respectively. The parameters