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Annealing temperature effects on ferromagnetism and structure of Si1−xMnx films prepared by magnetron sputtering

✍ Scribed by Tiecheng Li; Liping Guo; Congxiao Liu; Guoliang Peng; Bo He; Zhiyun Pan; Zhongpo Zhou; Shuigang Xu; Zuci Quan

Book ID
113940961
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
854 KB
Volume
86
Category
Article
ISSN
0042-207X

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ZnO thin films were deposited on corning glass substrates by RF magnetron sputtering at room temperature. The dependence of crystal structure, morphology and optical properties on postdeposition annealing was investigated using XRD, AFM and UV-vis Spectrophotometer. The asdeposited films were amorph