Annealing Behavior of Irradiation-Induced Damage in an AlGaAs/GaAs Heterostructure by Low-Energy Electron Beam

✍ Scribed by Wada, Toshimi; Kanayama, Toshihiko; Ichimura, Shingo; Sugiyama, Yoshinobu; Komuro, Masanori

• Book ID: 125840461
• Publisher: Institute of Pure and Applied Physics
• Year: 1994
• Tongue: English
• Weight: 692 KB
• Volume: 33
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.33.7228