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Anisotropy of chromium films as a function of thickness, deposition rate and the substrate material. (USSR)


Book ID
108389648
Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
310 KB
Volume
27
Category
Article
ISSN
0042-207X

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Characteristics of sculptured Cu thin fi
✍ H. Savaloni; F. Babaei; S. Song; F. Placido πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 547 KB

The copper sculptured thin films were deposited on glass substrates (microscope slide) by resistive evaporation from tungsten boats at room temperature. The purity of copper was >99.98% (cut from wire with a diameter of 0.5 mm supplied by Goodfellow Metals). An Edwards (Edwards E19 A3) coating plant