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The composition of vacuum-deposited EuSx films as a function of substrate temperature and deposition rate

โœ Scribed by K. Schienbein; G. Mair; K. Reichelt


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
130 KB
Volume
52
Category
Article
ISSN
0040-6090

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The feasibility of using pyrolytic laser-induced chemical vapor deposition (LCVD) to deposit carbon coatings on moving fused quartz substrates is investigated. This LCVD system uses a CO laser to locally heat a substrate in open air to create a 2 hot spot. Pyrolysis of hydrocarbon species occurs and