Characteristics of sculptured Cu thin films and their optical properties as a function of deposition rate

✍ Scribed by H. Savaloni; F. Babaei; S. Song; F. Placido

• Book ID: 104001438
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 547 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.05.011

✦ Synopsis

The copper sculptured thin films were deposited on glass substrates (microscope slide) by resistive evaporation from tungsten boats at room temperature. The purity of copper was >99.98% (cut from wire with a diameter of 0.5 mm supplied by Goodfellow Metals). An Edwards (Edwards E19 A3) coating plant with a base pressure of 2 Â 10 À6 mbar was used. The deposition angle was fixed at 758 and a substrate azimuthal rotation speed of