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Anisotropic etching for VLSI wafers

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📜 SIMILAR VOLUMES

KOH anisotropic etching of Si wafers for

✍ Jian-Yang Lin; Pai-Yu Chang 📂 Article 📅 2011 🏛 The Institution of Engineering and Technology 🌐 English ⚖ 660 KB

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✍ Ephrath, L.M. 📂 Article 📅 1981 🏛 IEEE 🌐 English ⚖ 733 KB

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✍ T. Nishimura; H. Suzuki; T. Satake 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 246 KB

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✍ Gasanli, Sh. M. ;Gasanly, N. M. ;Streltsov, A. K. 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 309 KB

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✍ Ciarlo, D R 📂 Article 📅 1992 🏛 Institute of Physics 🌐 English ⚖ 261 KB

Anisotropic etching for optical gratings

✍ A. Klumpp; K. Kühl; U. Schaber; H.U. Käufl; W. Lang 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 623 KB