✦ LIBER ✦
KOH anisotropic etching of Si wafers for light-emitting diode electrode arrays
✍ Scribed by Jian-Yang Lin; Pai-Yu Chang
- Book ID
- 114461592
- Publisher
- The Institution of Engineering and Technology
- Year
- 2011
- Tongue
- English
- Weight
- 660 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1750-0443
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