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Angular distribution and sputtering yield of Al and Al2O3 during 40 key argon ion bombardment

✍ Scribed by V Orlinov; G Mladenov; I Petrov; M Braun; B Emmoth

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 360 KB
Volume: 32
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(82)93847-7

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