Angular distributions and sputtering yield of Al and Al2O3 during 40 keV argon ion bombardment: V Orlinov et al,Vacuum, 32 (12), 1982, 747–752

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 175 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90206-4