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Angle resolved X-ray photoelectron spectroscopic study of ultrathin oxynitrides

✍ Scribed by K Kawase; J Tanimura; H Kurokawa; K Kobayashi; A Teramoto; T Ogata; M Inoue

Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 216 KB
Volume: 2
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(99)00019-0

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