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Angle and energy distributions of sputtered particles from molybdenum (110) surfaces

โœ Scribed by I.R. Chakarov; V.T. Cherepin; D.S. Karpuzov; A.A. Kosyachkov; R.G. Vichev

Book ID
113280140
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
492 KB
Volume
39
Category
Article
ISSN
0168-583X

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The energy and angular distributions of Ni and Al atoms sputtered from Ni 3 Al(100) by 8 keV Ar have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni 3 Al(100), are predominantly sputtered along close packed <110>