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Analytical modeling and optimization for a laterally-driven polysilicon thermal actuator

✍ Scribed by Q.-A. Huang; N. K. S. Lee

Book ID: 106186353
Publisher: Springer-Verlag
Year: 1999
Tongue: English
Weight: 145 KB
Volume: 5
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s005420050152

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