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Analytic Modeling Of RF MEMS Shunt Connected Capacitive Switches

✍ Scribed by Bartolucci, G.; Angelis, G. De; Lucibello, A.; Marcelli, R.; Proietti, E.


Book ID
127298042
Publisher
Taylor and Francis Group
Year
2012
Tongue
English
Weight
308 KB
Volume
26
Category
Article
ISSN
0920-5071

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## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf