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Analysis of ultra-small photonic large scale integrated circuits

✍ Scribed by D. Gamra; F. Ouerghi; W. Belhadj; F. Abdelmalek; M. Mejatty; H. Bouchriha


Book ID
106488871
Publisher
Springer
Year
2004
Tongue
English
Weight
229 KB
Volume
36
Category
Article
ISSN
0306-8919

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Al-SI-Cu films deposIted on substrates of SI, borophosphate silicate glass and TiW mth improved electrical properties (lower sheet resistance) and rehatnhty (lugher Al[lll] diffraction mtensity) obtained by the proposed metalbzatlon process are described A chemometrx approach of umfymg the expernnen