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Analysis of the nanoimprint lithography with a viscous model

✍ Scribed by Wen-Bin Young

Book ID: 108207433
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 428 KB
Volume: 77
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.01.024

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