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Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

✍ Scribed by Sonne, M.R.; Hattel, J.H.

Book ID: 120041942
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 762 KB
Volume: 106
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2013.01.049

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