The relation between hydrogen retention and optical properties of an amorphous tungsten trioxide (WO 3 ) film was investigated using 10 keV H รพ 2 ion implantation. WO 3 films (350 nm) covered by W layers (200 nm) were deposited on SiO 2 glass substrates by sputtering in a mixture of Ar and O 2 gases
Analysis of surface morphological change in PET films induced by tungsten ion implantation
โ Scribed by G. Zhou; R. Wang; T.H. Zhang
- Book ID
- 108225776
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 410 KB
- Volume
- 268
- Category
- Article
- ISSN
- 0168-583X
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