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Analysis of microdefects in a silicon single crystal by diffuse X-ray scattering using synchrotron radiation

✍ Scribed by Hante Kim; Shun Ji Gotoh; Toshio Takahashi; Tetsuya Ishikawa; Seishi Kikuta

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 218 KB
Volume: 246
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(86)90199-3

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