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Analysis of graded metal-carbon films produced by dual-cathode sputtering

โœ Scribed by H.R. Wilson; D.R. McKenzie; L.M. Briggs


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
348 KB
Volume
91
Category
Article
ISSN
0040-6090

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Gold and platinum patterns have been produced by UV-induced decomposition of a range of organometallic films. A nanosecond-pulsed excimer laser operating at 193 or 248 nm was used as the source of illumination. The metal thereby formed has been extensively studied using a wide range of analytical te