Analysis of metal features produced by uv irradiation of organometallic films

✍ Scribed by G.J Berry; J.A Cairns; M.R Davidson; Y.C Fan; A.G Fitzgerald; J Thomson; W Shaikh

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 503 KB
• Volume: 162-163
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(00)00240-3

✦ Synopsis

Gold and platinum patterns have been produced by UV-induced decomposition of a range of organometallic films. A nanosecond-pulsed excimer laser operating at 193 or 248 nm was used as the source of illumination. The metal thereby formed has been extensively studied using a wide range of analytical techniques. These include scanning and transmission Ž . Ž . Ž . electron microscopy SEM, TEM , atomic force microscopy AFM , and energy dispersive X-ray microanalysis EDX . This analysis has demonstrated that the metal is polycrystalline with a grain size of typically 10 nm. This technique for producing high-resolution metal patterns has wide ranging applications, especially in microelectronics.