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Analysis of charge, mass and energy of large gas cluster ions and applications for surface processing

✍ Scribed by D.R. Swenson

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
256 KB
Volume
241
Category
Article
ISSN
0168-583X

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Application of low-energy noble-gas ion
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✍ van den Oetelaar, L. C. A.; van Benthem, H. E.; Helwegen, J. H. J. M.; Stapel, P πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 488 KB πŸ‘ 2 views

Low-energy noble-gas ion scattering (LEIS) probes the outermost atomic layer of a material, but a quantitative compositional analysis of this layer is not straightforward. It is demonstrated that quantiÐcation by calibration can be done, assuming that ion fractions and shielding e †ects are the same