An investigation of Si0.5Ge0.5 alloy oxidation by high dose oxygen implantation

✍ Scribed by J.E. Castle; H.D. Liu; J.F. Watts; J.P. Zhang; P.L.F. Hemment; U. Bussmann; A.K. Robinson; S.M. Newstead; A.R. Powell; T.E. Whall; E.H.C. Parker

• Book ID: 113282468
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 447 KB
• Volume: 55
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(91)96260-r